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Plasma Power Supply Product List

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[Case Study] Power Supply for Low-Temperature Plasma (Atmospheric Pressure Plasma)

Examples of high-speed and high-frequency applications using SiC power devices and a unique switching system!

We would like to introduce a case study on solving challenges related to "power supplies for low-temperature plasma (atmospheric pressure plasma)." The customer's issue in this case was that the throughput of the equipment was not increasing due to inefficiency, leading to higher costs. In response, we proposed increasing the speed of the power supply (improving the voltage rise time) and enhancing efficiency through high frequency. We confirmed high efficiency through increased plasma density, and it was demonstrated by multiple users, leading to the initiation of trial operations aimed at full-scale adoption (introduction into mass production lines). [Case Overview] ■ Issue: Increased costs due to low throughput ■ Proposed Solution: Efficiency improvement through speeding up the power supply and increasing frequency ■ Result: Confirmation of high efficiency through increased plasma density *For more details, please feel free to contact us.

  • Switching Power Supply
  • Plasma Power Supply

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Kjellberg Plasma Power Supply

Economic, Simple, Quality

Kjellberg plasma power source - smart focus 300 and smart focus 400 1. Economical Price 2. Low cost & high efficiency 3. Reduce consumables 4. Wide application range

  • Plastic processing machines (cutting and rolling)
  • Plasma Power Supply

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Plasma power supply, large plasma power supply

Plasma power supply, large plasma power supply

Special power supply devices such as plasma and laser excitation Continuous wave   Several kHz 600 kW CW   2-5 MHz 100-300 kW CW   13.56 MHz 450 kW CW  Pulse to continuous wave compatible   13.56 MHz 50 kW external excitation   40 MHz 40 kW self-excitation   100 MHz 20 kW self-excitation   Fundamental wave approximately 2 peaks to CW   Two frequency modulation, for example, 10 kHz + 100 kHz

  • Other processing machines
  • Other physicochemical equipment
  • Other semiconductor manufacturing equipment
  • Plasma Power Supply

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